摘要
试验研究了UV-LIGA各工艺环节(包括前后烘、曝光、显影、去胶、电铸等)对金属基片上制造金属微结构器件质量的影响,并组合优化了操作条件和工艺参数。试验结果表明:采用优化后的UV-LIGA工艺条件,制造出的金属微结构器件(如微齿轮、微流道)轮廓清晰,表面质量好,无明显缺陷,与基底结合良好。
This paper studied experimentally the influences of processing steps ot U V--LIGA,including before ＆ post exposure bake, exposure, development, resist removal, micro electroforming, on the quality of micro--structures ＆ micro--devices fabricated on metal--substrate, and optimized their operation conditions and processing parameters. Experimental results indicate that the metal micro- structures ＆ micro--devices such as microgear and micro flow channel fabricated by the optimized UV--LIGA processes has clear contour, good surface quality and excellent linkage with substrate,and it has not visible defects.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2006年第21期2216-2220,共5页
China Mechanical Engineering
基金
江苏省自然科学基金资助项目(BK2004214)
关键词
UV—LIGA
微结构器件
SU-8胶
光刻
微细电铸
UV -- LIGA
micro -- structure
micro -- device
SU -- 8 resist
photography
micro electroforming
