摘要
Europium-substituted bismuth titanate (Bi3.25Eu0.75Ti3O12) thin films were deposited on the Pt/Ti/SiO2/Si(111) substrates by metal-organic decomposition (MOD) method using a repeated coating/drying cycle. Effect of crystallization temperature on microstructure of Bi3.25Eu0.75Ti3O12(BET) thin films was investigated by X-ray diffractometry(XRD), scanning electron microscopy (SEM) and Raman spectroscopy, and ferroelectric property was studied by Precision Workstation Ferroelectric Tester. The crystallinity of BET thin films is improved and the average grain size increases with the crystallization temperature from 600 to 750 ℃. Under 9 V applied voltage, the remnant polarization (2Pr) of BET thin films annealed at 700 ℃ is 50.7 μm/cm2, which is higher than that of the films annealed at 600, 650 and 750℃.
Europium-substituted bismuth titanate (Bi3.25EU0.75Ti3O12) thin films were deposited on the Pt/Ti/SiO2/Si(111) substrates by metal-organic decomposition (MOD) method using a repeated coating/drying cycle. Effect of crystallization temperature on mierostructure of Bi3.25Eu0.75Ti3O12 (BET) thin films was investigated by X-ray diffractometry(XRD), scanning electron microscopy (SEM) and Raman spectroscopy, and ferroelectric property was studied by Precision Workstation Ferroelectric Tester. The crystallinity of BET thin films is improved and the average grain size increases with the crystallization temperature from 600 to 750 ℃. Under 9 V applied voltage, the remnant polarization (2Pt) of BET thin films annealed at 700 ℃ is 50.7 μm/cm^2, which is higher than that of the films annealed at 600, 650 and 750℃
出处
《中国有色金属学会会刊:英文版》
CSCD
2006年第5期1154-1158,共5页
Transactions of Nonferrous Metals Society of China
基金
Project(10472099) supported by the National Natural Science Foundation of China
Project(05JJ30208) supported by the Natural Science Foundation of Hunan Province, China
Project(05FJ2005) supported by Key Project of Scientific and Technological Department of Hunan Province, China
关键词
BET薄膜
铁电性能
金属有机分解
钙钛矿
MOD
BET thin film
ferroelectric property
metal-organic decomposition
Bi-layered perovskite