基于原子力显微镜的纳米三维刻划加工控制系统

Study on Control of Three-Dimensional Nanoscratching Facility Based on AFM

介绍了一套新型的纳米三维刻划加工控制系统,系统基于AFM原子力显微镜,配合三维微动工作台,设计开发了专门的加工控制装置,成功的实现了纳米刻划加工中的深度控制问题,可实现在X、Y、Z方向分别为100μm×100μm×20μm范围内,X、Y向精度为±5 nm、Z向精度为±10 nm的三维结构机械刻划加工,应用结果表明,该系统实现了具有在位形貌检测功能的三维纳米刻划加工,在微纳米刻划加工领域具有一定的实用性和推广价值。

An innovational control system of three--dimensional nanoseratehing faeillty is presented. The system is built upon the commercialized AFM and the three--dlmensional micro displacement moving stage. Special machining control system has been developed, which is eharaeterlzed by the cutting depth control during the nanoseratehing process. The three--dimensional nanostrueture scratching can be realized in the scale of 100μm × 100μm × 20μm, and the dimensional accuracy of the orientation X, Y and Z are ± 5nm, ±5nm and 4-10nm respeetlvely. Experimental results show that both the three--dimensional nanoseratehing function and its intrinsieal on--line micro topology measurement funetion can work correctly on this enhanced platform.