电子回旋共振放电的电离特性PIC/MCC模拟(Ⅰ)——物理模型与理论方法

The PIC/MCC simulation of the ionization processes in electron cyclotron resonance discharge(Ⅰ)——Physical model and theoretical methods

采用粒子模拟与蒙特卡罗相结合(PIC/MCC)的方法对电子回旋共振(ECR)放电中的电离过程进行了模拟,其中带电粒子与微波的相互作用由PIC方法的电磁模型描述,粒子间的碰撞过程由MCC方法描述.考虑的碰撞类型有电子与中性粒子的弹性、激发、电离碰撞,离子与中性粒子的弹性、电荷交换碰撞,碰撞截面均依赖于能量而变化.阐述了理论分析的过程,为数值模拟ECR放电奠定了基础.

We present a theoretical and computational model to study the ionization of the electron cyclotron resonance （ECR） microwave discharge using a quasi-three-dimensional electromagnetic particle-in-cell plus Monte Carlo collision method. The interaction between the charged particles and microwave fields are described by particle-in-cell method. The collision processes are treated with Monte Carlo method. Elastic, excitational, and ionizing electron-neutral collisions and elastic, charge exchange ion-neutral collisions are included. The cross sections are the functions of particle＇ s energy. The theoretical part of simulation is introduced in detaid as foundation of the numerical simulation.