影响磁性薄膜微波磁谱测量精度的因素

Factors Influencing Precision of Measurement for Determining the Spectral Complex Permeability of Thin Ferromagnetic Films

针对铁磁薄膜复磁导率在微波频段的测量,本文采用了一种利用短路微带线进行扫频的新方法。在介绍其测量过程的基础上,重点分析了待测薄膜电阻率、修正因子K及系统校准等因素对测量的影响,并对应提出了减小误差的解决方法,从而提高了测量的精度。

In the present paper, a new method for determining the complex permeability of thin magnetic films is adopted. The measurement technique was carried out by a one-port permeameter, which is based on a short-circuited microstrip and frequency sweep. After introducing the measurement process, we chiefly show that the frequency - dependent permeability is affected by the electrical resistivity of the ferromagnetic layer, correct factor K as well as system calibration procedure and so on, and present the methods of reducing errors that have resulted from these factors, to help to improve the precision of the measurement.