表面微加工MEMS器件工艺层模型可制造性评价

Manufacturability evaluation of layer model for surface micro-machined MEMS

针对基于实体模型生成的微电机系统(MEMS)器件工艺层模型难以完全保证可制造性的问题,结合标准的表面微加工工艺,从可释放性、上下可结合性和腐蚀可制造性等方面分析了产生可制造问题的原因,并给出了可制造性评价方法.基于可制造性评价结果,进一步提出了一种生成改进建议的方法.实例分析表明,所提出的工艺层模型可制造性评价方法提高了MEMS器件的可制造性评价质量与效率,并使得设计人员能够更早地发现与更改设计中存在的可制造性问题.

A systematic method of evaluating and improving layer model was proposed to avoid manufactur-ability problems of the layer model generated from the solid model for surface micro-machined mieroelee-tromeehanieal systems （MEMS）. The manufaeturability of the layer model was analyzed, which involved the releasability of sacrificial material, the contact of all layers, the manufacturability of etching, etc. The evaluation algorithm was also developed based on the analysis. Suggestions were redesigned and generated based on evaluation results, which were presented to the designer to refine the initial design. The algorithm was implemented and some test results were given.