摘要
采用改进的陶瓷烧结工艺，研究了用于射频磁控溅射工艺的大尺寸薄型ＬｉＮｂＯ３陶瓷靶材的烧结工艺，解决了烧结过程中Ｌｉ２Ｏ的外逸造成成分偏差和Ｌｉ２Ｏ含量偏低时不易得到致密陶瓷的问题，探讨了Ｌｉ２Ｏ在烧结过程中的作用，制备出了高强度的ＬｉＮｂＯ３＋Ｌｉ２Ｏ系列陶瓷靶材．
By using an improved ceramic sintering technique, the sintering process for the preparation of large-size thin LiNbO3 ceramic targets for r. f. magneto-sputtering is studied. The problem of the deviation of chemical composition due to the loss of Li2O during sintering and of how to obtain LiNbO3 ceramic of high density has been sooved. The role of Li2O during sintering is discussed. A series of LiNbO3+Li2O ceramic targets of high density for sputtering have been prepared.
出处
《华中理工大学学报》
CSCD
北大核心
1996年第5期76-78,共3页
Journal of Huazhong University of Science and Technology
关键词
铌酸锂
铁电陶瓷靶
烧结
微观结构
LiNbO_3
ferroelectric ceramic target
sintering
microstructure
