摘要
采用有限元方法分析了激光清洗过程中基片表面的温度分布，研究了激光清洗过程中清洗阈值和损伤阈值存在的原因，推导出使用波长为３０８ｎｍ，脉宽为２８ｎｓ的准分子激光清洗硅片表面油脂的清洗阈值和损伤阈值，并进行了实验验证。
The temperature distribution on a substrate surface during laser cleaning is investigated with the finite element method and the reason why there exist a cleaning threshold and a damage threshold is studied. The theoretical results of the cleaning threshold and the damage threshold of Si substrate surface with grease are obtained when the substrate is cleaned with the excimer laser of a wavelength of 308 nm and a pulse width of 28 ns. The cleaning threshold is found to be between 0.672 ×10 7 W/cm 2 and 0.93×10 7 W/cm 2 while the damage threshold, 3.875×10 7 W/cm 2. They are in concordance with the experimental results.
出处
《华中理工大学学报》
CSCD
北大核心
1996年第6期50-53,共4页
Journal of Huazhong University of Science and Technology
基金
激光技术国家重点实验室基金
