摘要
对“用于GaN的生产型MOCVD”设备控制系统的软/硬件结构、关键技术进行了描述,介绍了国外几种生产型GaNMOCVD设备控制系统的特点;分析了MOCVD设备控制技术的发展趋势。
The key technology points and software and hardware controlling structures for ＂GaN MOCVD＂ developed by the 48th research institute of CETC are described, then controlling system characteristics of several GaN MOCVD system is introduced. The controlling technology trend for MOCVD system is analyzed.
出处
《电子工业专用设备》
2006年第11期28-32,49,共6页
Equipment for Electronic Products Manufacturing
基金
国家"863"计划项目(2002AA311243)
