利用图像中的探针信息获取探针形貌的方法

Reconstruction of tip geometry from SPM images

扫描探针显微技术已在纳米甚至原子级的形貌获取中得到了广泛地应用。其分辨本领在很大程度上依赖于探针的形貌尺寸。传统的检测探针的方法大多对针尖的损伤很大或需要复杂的仪器,这就使这些方法带有一定局限性。本文提出利用扫描图像中反映的探针信息数值求解探针形貌的方法,利用探针扫描不同样品所得到的扫描图像还原探针的形貌,结果显示用此算法能够还原出原针尖的形貌。为了更好地与实际结果对比,用原子力显微镜扫描图像来验证此方法的正确性,结果显示反构造的探针形貌结果与MI公司所提供的探针尺寸吻合很好。

Nano-scale images have been obtained using scanning probe micooscopy. The resolution of the scanning probe microscopy is decided by the geometry and radius of the tip. In this paper, we proposed a new method to get the geometry and radius of the tip basing on the relationship between the tip and the surface. Its feasibility has been proved by numerical analysis. At last, comparison was made between the probe reconstructed by AFM （MI） image and the SEM image of the same probe. The result indicates that they are well matched.