小型化电容式压力传感器及变换器

The Miniaturization Capacitive Pressure Sensor and Transducer

介绍了一种新型结构的电容式压力敏感元件及其信号变换器,给出了敏感元件与变换器联合测试结果,并对变换器的工作原理作了较详尽的分析。非线性误差大是电容式压力传感器的主要误差,通过在变换电路上采用一种方法可以很好地解决这一问题。此方法具有非线性纠正能力强、调试方便的特点。该电路特点是精度高、分辨率高、动态响应快、低功耗。整机表现出很高的时间稳定性。

A new type construction of capacitive pressure sensor is introduced. The test result is provided when sensor and transducer work together, and the analysis about the working principle of transducer is included. Non-linear uncertainty is the important uncertainty of capacitive pressure sensor, the method introduced can solve the problem.