摘要
The relationship between the arrangement of tungsten-halogen lamps and the uniformity of irradiance received by the wafer is discussed, and a sort of ayial-symmetrical lamps-array is designed to guarantee that the irradiation on the edge is approximately the same as the one on the center of the wafer. The magnitude of temperature on the wafer vs. the power of tungsten-halogen lamps is calculated numerically.
The relationship between the arrangement of tungsten-halogen lamps and the uniformity of irradiance received by the wafer is discussed, and a sort of axial-symmetrical lamps-array is designed to guarantee that the irradiation on the edge is approximately the same as the one on the center of the wafer. The magnitude of temperature on the wafer vs. the power of tungsten-halogen lamps is calculated numerically.
基金
Foundationfor Key Youth Teachers from Hunan Province(521105237)
Natural Science Foundation of HunanUniversity(521101805)
关键词
大直径晶片
快速热处理
钨卤素灯
退火处理
Rapid thermal processing
Rapid thermal annealing
Tungsten-halogen lamp
Large diameter wafer