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在Sr^(2+):α-BBO单晶衬底上生长β-BBO薄膜的研究

Growth of β-BBO Thin Films on Sr^(2+)-doped α-BBO Substrates
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摘要 采用液相外延法、脉冲激光沉积法以及气相传输平衡法在Sr^(2+)∶α-BBO(001)衬底上生长了质量优异的β-BBO薄膜,对薄膜进行了X射线衍射测试以及双晶摇摆曲线分析,结果表明,采用Sr^(2+)∶α-BBO单晶作为衬底制备的β-BBO薄膜具有高的择优取向度和低的半峰宽值.同目前制备β-BBO薄膜所采用的其他衬底材料相比,Sr^(2+)∶α-BBO和β-BBO之间具有结构相似、透光范围匹配以及化学稳定性匹配的优点,表明Sr^(2+)∶α-BBO单晶将是生长β-BBO薄膜的优异衬底材料. Crystalline β-BBO thin films were successfully prepared on (001)-oriented Sr^2+-doped α-BBO substrates by using liquid phase epitaxy, pulsed laser deposition and vapor transport equilibration techniques. The films were characterized by X-ray diffraction and X-ray rocking curve. The present results manifest that the β-BBO thin films grown on Sr^2+-doped α-BBO substrates have larger degree of orientation f value and smaller X-ray rocking curve FWHM than the ones grown on other reported substrates. Compared with other substrates, α-BBO has the similar structure, the same UV cutoff and the same chemical properties to β-BBO. These results reveal that Sr^2+-doped α-BBO single crystal may be a promising substrate proper to the growth of β-BBO films.
出处 《无机材料学报》 SCIE EI CAS CSCD 北大核心 2006年第6期1454-1460,共7页 Journal of Inorganic Materials
关键词 Sr^2+:α-BBO衬底 β-BBO薄膜 液相外延 脉冲激光沉积 气相传输平衡 Sr^2+-doped α-BBO substrates β-BBO thin films liquid phase epitaxy pulsed laser deposition vapor transport equilibration
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