波长色散X射线荧光分析的新发展

Development of Wavelength Dispersive X-ray Fluorescence Analysis

论述了波长色散X射线荧光分析装置的发展状况。除了继续发展其在高含量、常量和微量元素分析上高精度、高稳定性的固有特点之外,在进一步提高灵敏度,使分析范围扩展到痕量分析范围;开拓微区面分布的元素成像分析;进一步对传统分析困难的轻元素和中重金属元素的探讨,开发新的高级次谱线分析方法;适应新材料特别是纳米材料的分析要求,对薄膜分析的开拓等方面,已经有了长足的发展。本文介绍在商品化的分析装置方面的发展状况。同时本文引入对无标样分析的基本参数法(F P法)目前发展状况的介绍。

It discussed the development situation of wavelength dispersive X-ray fluorescence （WD-XRF） analytic device. Except the WD-XRF develops continuously the feature of high precision and stability for normal and micro contents element, its analytical range has expanded to trace element. To overcome the weak points of light and middle-heavy elemental analytic, it has researched the newest high order spectrum analytic method. The micro-area elemental distribution image analysis have been developed. To suited new material and nanometer scale especially, thin film analysis has been progressed in the commer- cial equipment and apparatus. Meanwhile, this paper has briefly introduced the developing situation of the Fundamental Parameter （FP） method which quantitative analysis without standard samples.