半导体气体传感器敏感机理的研究进展

The progress in sensing mechanism of semiconductor gas sensors

为了改进半导体气体传感器的选择性,研究人员利用四极质谱仪、气相色谱、阻抗测试、XPS等检测手段对半导体气体传感器的乙醇、硫化氢、氯气、一氧化碳、氢气、含氮化合物和有机烷烃等常见检测气体的敏感机理进行了研究,取得了一些进展。对研究所得结论和理论模型进行了概述,并提出了今后的研究方向。

To improve gas selectivity of semiconductor gas sensors, the researchers studied the gas sensing mechanism of C2H3OH, H2S, Cl2, CO, H2, NOx and CH4 by means of quadrupole mass spectrometer, gas chromatography, impedance testing,XPS and so on, some important conclusions are gained. The sensing mechanism and theory models of semiconductor gas sensors are introduced, and investigation directions of sensing mechanism in the future are suggested in the end.