正交实验法优选电沉积Co-Pt-W磁性薄膜制备工艺

Optimization of process for preparing Co-Pt-W magnetic films electrodeposited by orthogonal experiments

利用正交设计L_(25)(5~6)安排实验,分别以矫顽力和磁滞回线的方形度为考察指标,通过极差分析和方差分析优化Co-Pt-W磁性薄膜电沉积制备工艺,结合工业生产的实际需求,得到Na_2WO_4·2H_2O及(NH_4)_2C_6H_6O_7浓度分别为0．08L、0．198mol/L,电流密度为5mA/cm^2,温度为60℃的制备条件为最佳组合。在此条件下制备了Co-Pt-W薄膜样品,并对其磁性能进行验证,对结构和形貌进行了测量。结果表明hcp结构有利于电沉积Co-Pt-W薄膜的硬磁性能。

To optimize the experimental parameters of electrodeposited Co-Pt-W films, orthogonal experiment L25 （5^6） was designed with coercivity and squareness ratio as referring index, respectively. Considering the results of range analysis and variance analysis as well as industrialized demands, we obtained that the concentration of Na2WO4 · 2H2O 0. 08mol/L and the concentration of （NH4）2C6H6O7 0. 198mol/L, current density 5mA/cm^2, temperature 60℃, were the most favorable condition for electrodeposited Co-Pt-W thin films. Furthermore, the magnetic property of sample prepared under the optimized experimental condition was characterized by vibrating sample magnetometer （VSM）, the phase structure and morphology of Co-Pt-W were also measured. It turns out that hcp structure favors permanent magnetic property.