旋转载体驱动硅微机械陀螺的设计和性能检测

Design and Performance Test of a Silicon Micromachined Gyro Driving by Rotating Carrier

提出了一种利用旋转载体自身角速度驱动的硅微机械陀螺,分析了该陀螺的工作原理,建立了这种陀螺的数学模型,设计了该陀螺的敏感结构,计算了陀螺的结构动力学参数,设计并分析了陀螺的信号检测与处理电路并针对该陀螺的特点设计了性能测试装置。理论研究和性能测试表明,利用旋转载体自身角速度驱动的硅微机械陀螺结构原理正确。

Introduced was the structural principle of a novel silicon micromachined gyroscope. This silicon micromachined gyroscope was driven by the rotating carrier＇s angular velocity. Constructed was the mathematic module of the micromachined gyroscope. The sensing structure of the micromachined gyroscope and the dynamics parameters of the micromachined gyroscope were designed and calculated. The signal detecting circuit of the micromachined gyroscope was also described, And then, the signal processing circuit of the micromachined gyroscope was analyzed. The performance test equipment for the micromachined gyroscope＇s characteristic was designed, The theoretical research and computer imitation are certificated that the structural principle of the silicon micromachined gyroscope driven by rotating carrier＇s angular velocity is correct.