对压电陶瓷微振动干涉测量装置的研究

Measurement of an Micro Vibration Piezoelectric Ceramic Interference Filter

采用激光干涉的方法,对压电陶瓷的压电特性进行观察和测量．主要是对压电陶瓷的振动幅度和驱动信号周期进行测量计算．采用单片机编程计时计数,计算驱动时间t和干涉条纹移动数目m,再编程算法求出压电陶瓷位移,最后将测量计算值送数码管显示．

The ceramics piezoelectricity characteristics whith includes vibrational swing and period of driving signal have been observed and measured with the method of laser intefferometry. Based on the counter and timer of single chip Micyoco, the driving time, the amount of moved intefferometry stripe and the displacement of ceramics piezoelectricity have been measured and displayed on digital tube dectrocircuit.