摘要
论述了用于哈特曼波前探测系统的透射式光学扩束器的研制。以三级像差理论为基础,分析了传统扩束器没能很好校正轴外像差的原因,在推导计算出初始结构参数后,通过ZEMAX光学设计软件,设计出轴上和轴外傢差都得到很好校正的、大口径、大相对孔径、视场可增大的新型扩束器。并根据此哈特曼扩束系统的实际使用要求,考虑支撑受力与热变形等因素,为光学元件配以相应的结构设计,给出了具体的设计实例。介绍了加工过程与调整方法,提供了检验方式。最终验收得到波前PV值为λ/4。
The manufacture of transmission optics beam expander used in Hartmann wavefront detection system was introduced. Based on the third-order aberration theory, the reasons why off-axis aberrations can't be well corrected for traditional beam expander were analyzed. Submitting the primary parameters to optical design software of ZEMAX, a new type of beam expander which can perfectly correct the on-axis and off-axis aberrations is designed. It provided with wide aperture, large relative aperture and large field of vision. According to the actual demands of Hartmann beam expander, a concrete design example is presented, and corresponding mechanical design is matched for it. The ways of fabrication, adjusting and testing are introduced too.
出处
《量子电子学报》
CAS
CSCD
北大核心
2006年第6期788-793,共6页
Chinese Journal of Quantum Electronics
关键词
几何光学
哈特曼扩束器
非球面光学
像差理论
geometric optics
Hartmann beam expander
aspheric optics
aberration theory