低气压介质阻挡放电击穿特性的研究

Study on Breakdown Characteristic of Low Pressure Dielectric Barrier Discharge

实验研究了在He、Ne、Ar中低气压低频介质阻挡放电的击穿特性.这种介质阻挡放电的电流波形是一系列脉冲,它是由外电场作用下的电子繁流和壁电荷电场对繁流的猝灭作用的结果.考虑了击穿过程中带电粒子的扩散损耗,实验研究和理论分析表明其击穿电压明显高于按Paschen定律计算所得结果,并分别依赖于气压和极间距离,而不是两者的乘积.离子诱导二次电子发射系数和击穿瞬间的电子平均能量也可用测量其不同极间距离的击穿特性来近似地确定,本文讨论了这种放电击穿特性的实验结果和理论分析.

Breakdown characteristics of the low-frequency dielectric barrier discharge （DBD） at low pressure are investigated experimentally in He, Ne and At. The current waveform of this DBD is a series of pulses that is caused by the results of the electron avalanches under the action of the applied field and the quenching effect of the wall-charges field on the avalanches. The experimental investigation and the theoretical analysis on its breakdown characteristics indicate that its breakdown voltage is higher then that calculated by Paschen law and depends respectively on the filled-gas pressure and the distance between the electrodes, instead of their product,due to considering the diffusion loss of the charged particles in the breakdown processes. The ion-induced secondary electron emission coefficient and the mean electron energy at the breakdown moment can also be determined approximately by measuring the breakdown characteristics of the discharge tubes with different distance between the electrodes. The experimental results and the theoretical analysis of this DBD are discussed in this paper.