摘要
介绍TDG-28型大直径区熔单晶炉的特点和主要技术指标及性能。该设备在一定的工艺条件下可以稳定生产直径为φ75～100mm的高阻率无位错单晶硅;由于采用铸铁件结构使该炉具有一定的防震能力,不需要庞大的减震基座;在国内首次使用晶体夹持机构和伸缩炉体;采用可控硅调压装置,使高频振荡器输出功率稳定性好,效率高。
The main technical characteristics of TDG-80 zone melting single-crystal furnace are introduced. Under certain technical conditions, the equipment can produce dislocation-free single-crystals with high specific resistance and φ75-100mm. Cast iron structure makes the furnace to be shock-proof without colossal shock-absorbing base. The crystal clamp and retractable furnace body are in first use for our country. Using SCR to adjust voltage makes the high frequency oscillator steady in output and effective.
