Sol－Gel法合成TiO_2纳米粉末和薄膜

Synthesis of TiO_2 Material by Sol-Gel Method

用Ｓｏｌ－Ｇｅｌ法成功地合成了ＴｉＯ_２纳米粉末和薄膜．研究了工艺参数如热处理温度，保温时间等因素对材料结构和物性的影响，粉末的平均粒径为３～１００ｎｍ，比表面积为１７～２５１ｍ￣２／ｇ，其在室温至７５０℃之间经历无定形态→锐钛矿→锐钛矿与金红石共存→金红石的相交；以石英玻璃和单晶硅为基片，采用勺胶法获得了沿（１０１）择优取向的金红石薄膜，研究表明，薄膜经锐钛矿转变为金红石的转变温度固基片不同而异，但比凝胶粉末的转变温度高．

Tio_2 nanostructured powder and thin films were synthesized by Sol-Gel method, the influences of the process parameters on the structure and properties of the material were studied. The size of the powder was 3-100nm, the specific surface area of the powder was 17-251m￣2g￣-1. The results show that the powder changes its phase structure from amorphous to anatase, then to dried phase of anatase and rutile, finally to rutile only when heat-treated at various temperatures. (101) preferentially oriented rutile films were successfully fabricated on quartz glass and p-(111) Si substrates, the transforming temperature from anatase to rutile in thin films depends on substrates, and it is higher than that of gel powder.