多层气敏薄膜表面吸附及界面扩散的研究

Study on Surface Adsorption and Interface Diffusion of Multilayer Gas-Sensing Films

制备了ＳｎＯ_２／ＺｎＯ及ＺｎＯ／ＳｎＯ_２多层结构的气敏薄膜．用能谱结合氩离子刻蚀的方法及Ｘ射线衍射法，对薄膜的表面吸附、膜间的相互扩散与组成等进行了研究．结果表明：薄膜表面存在少量的吸附氧．多层膜中锌的扩散远比锡强，提出了一个模型，对吸附现象作了初步的解释，讨论了造成锌锡扩散差异的原因．

SnO_2/ZnO and ZnO/SnO_2 multilayer gas-sensing films were prepared.The surface adsorption and interface diffusion of the multilayer films were studied by X-ray photoelectron spectroscopy combined with argon ions sputtering and X-ray diffraction. The results showed there was a little of adsorbed oxgen on the surface of the multilayers, and zinc atoms diffused faster than tin atoms in the films. A model was proposed to interprete the adsorption and a satisfactory explanation was obtained.The cause of the different diffusion ratio of zinc and tin atoms in the films was discussed.