Recent Developments and Applications in Unbalanced Mangnetron Sputtering

Sputtering deposition is one of the most important processes in the vacuum coating, it is widely used in microeletronics industries, optical films, and metallurgical coatings industry et al. Sputtering deposition is, in the vacuum conditions, sputtered particles from the target material deposit on the substrate using energetic ions to bombard surface of target to form a film.