基于多孔硅Bragg反射镜的液体浓度测量方法

A new method of liquid concentration measurement based on the porous silicon Bragg reflector

提出了一种利用多孔硅Bragg反射镜(简称PSBR)的反射谱来测量液体浓度的新方法。当在PSBR的孔内浸入不同浓度的液体时,多孔硅的有效折射率会发生变化,从而引起PSBR反射谱峰位发生变化。利用脉冲腐蚀法制备PSBR,采用正交参数设计法优化实验参数。对其进行了浓度测量实验和验证实验,测量误差小于0.14%。

A new method of measuring the liquid concentration is introduced using the reflectance of the porous silicon Bragg reflectors（PSBR）. When holes in PSBR are filled with liquid of different concentrations, the effective index of the PSBR will change, thus leading to the shift of the reflectance peaks will change. The pulsed etching method is adopted to fabricate PSBR, and the orghogonal method is used to optimize the experimental parameters. Liquid concentration measuring experiments and verifying experiments show that the measurement error is less than 0.14%.