原料对MOD法制铁电薄膜结构及性能的影响

Effect of Raw Materials on Structure and Properties of Ferroelectric Film Prepared by Metallorganic Decomposition

分别以硝酸镧和丁酸镧为原料，采用金属有机物热分解法合成了两种钛酸镧铅（ＰＬＴ）先体溶液，并对所制备的ＰＬＴ薄膜进行了性能比较。结果表明：以丁酸镧为原料合成的ＰＬＴ先体溶液稳定性好，不易水解，其薄膜介电频谱特性好，直流电阻率高；

Different ferroelectric lead lanthanum titanate (PLT) precursors were sythesized from raw materials of lanthanum nitrate (LN) and lanthanum butyrate (LB) respectively by metallorganic decomposition (MOD).Properties of the prepared PLT Films are compared. The experimental results show that PLT precursors prepared from LB have better antihydrolization, better dielectric frequency spectrum,higher DC resistivity,coercive field E c and remaining polarization P r than ones prepared from LN.