基于EOPN的晶圆制造系统实时调度仿真平台

An EOPN-Based Real-Time Scheduling Simulation Platform of Wafer Fabrication System

针对半导体晶圆制造系统(SWFS)的组织构成、加工过程和生产模式的典型特点,以拓展型面向对象Petri网(EOPN)为工具对该复杂系统建立了模型,在准确描述晶圆制造过程的基础上采用面向对象技术设计并开发了一套SWFS实时调度仿真平台.该平台不仅能够真实再现半导体晶圆的反复重入型加工过程,而且能够集成多种实时调度与派工控制算法,以准确高效的仿真计算进行算法测试和相应系统绩效的评价与预测.SWFS实时调度仿真平台的开发成功对SWFS的建模、调度和控制等相关研究起到积极的支持作用.

According to unique complicated features, this paper proposed a real-time scheduling simulation platform for the semiconductor wafer fabrication system （SWFS） with object oriented technology. Based on the high-fidelity system model established by an extended object-oriented Petri net （EOPN） modeling mechanism, the simulation platform may not only simulate the complex wafer fabrication process, but also be able to integrate various types of real time scheduling and dispatching policies, and compute, test and evaluate corresponding system performance. The development of simulation platform provides positive support for related research of modeling, schedule and control in the semiconductor manufacturing field.