高信噪比Langmuir探针系统

High signal-to-noise ratio Langmuir probe system

介绍了一套以积分网络为基础的新型Langmuir探针系统。该系统使用积分网络进行数据采集,在数据采集过程中同步完成模/数转换,有效地抑制了噪音干扰。以数据采集卡为接口与计算机系统进行数据通信,提出了一种在等离子体诊断中有效抵制噪音干扰的方法,大幅度提高了探针的信噪比。探针系统已成功地应用于ECR等离子体源中。实验表明:该探针系统具有良好的抗干扰效果,得到的I-V特性曲线平滑,无明显的背景干扰信号,获得高出普通Langmuir探针10.9dB的探针信噪比。

A new Langmuir probe system based on integrator is introduced. New features of the system include： the integrator network to implement the process of analog-to-digital conversion and to provide effective noise suppression; data processing card to communicate with the host computer. It gives a noise elimination method which increased signal-to-noise ratio dramatically. Successful operation of the system has been demonstrated in the electrically noisy environment of an ECR plasma source.