热光可调光衰减器的设计及测试

Design and measurement of thermo-optic variable optical attenuator

阐述Mach—Zehnder型可调光衰减器的原理，分析影响器件功率消耗和器件响应的因素，然后根据硅基波导器件大截面的单模脊型波导理论，设计VOA器件的结构参数．并测试出VOA器件的近场模斑，器件衰减为0-26．3dB，器件最大功率损耗为368mW，信号响应上升时间为7μs，信号响应下降时间为97μs．

According to Si thermo-optic effect, the authors discussed variable optical attenuator（VOA） theory based on Mach-Zehnder structure, and analyzed the factors influencing the VOA＇s power consumption and response time. In terms of single mode transmission theory in large cross-sectlon rib waveguide, the au- thors designed the VOA＇ s structure parameters, then measured its features. The dynamic attenuation range of the VOA was 0 - 26.3 dB. The maximum power consumption was 368 mW. The signal up-response time is 7μs, and down-response time was about 97μs.