类金刚石薄膜的激光损伤特性测试与分析

Laser Damage Characteristics of Diamond-Like Carbon Film

使用脉宽12 ns,波长1064 nm调Q Nd:YAG激光器对真空阴极电弧沉积(VCAD)法制备的类金刚石薄膜进行抗激光损伤测试,结果表明,VCAD法镀制的薄膜抗激光损伤阈值为0.6 J/cm2。通过对热冲击效应的数值计算,得到了光斑中心的温度场和薄膜表面的应力场分布。研究表明,热应力在类金刚石薄膜的破坏过程中起主导作用,脉冲电弧沉积的DLC薄膜的激光损伤主要源于应力破坏。

Diamond-like carbon （DLC） films, grown by vacuum cathode arc deposition, were irradiated with Q-switched, pulsed Nd： YAG laser（pulse width of 12 ns and wavelength of 1064 nm）. The laser damage was characterized with seanning electron microscopy（SEM）. The temperature and stress distribution of the films were evaluated with numerical calculation on the basis of thermal-shock model. The results show that thermal stress dominates laser damage of DLC films. And the threshold of laser damage resistance is found to be 0.6 J/cm^2