多晶硅的真空感应熔炼及定向凝固研究

Vacuum Induction Smelting and Directional Solidification of Multi-crystalline Silicon

以工业硅为原料进行了多晶硅的真空感应熔炼及定向凝固研究,用自行设计的真空定向凝固设备制备了多晶硅铸锭。金相显微镜观察显示铸锭的显微组织为粗大的柱状晶,经电感耦合等离子体发射光谱仪分析,其纯度由99·50%提高到99·86%,各种杂质含量都有所减少。

We have developed a vacuum directional solidification device to prepare multi-crystalline silicon ingot using metallurgical-grade silicon. Microstructure and purity of the multi-crystalline silicon have been observed by OM (optical microscope) and inductive coupled plasma spectrumer. The results show that the microstructure of ingot exhibits coarse columnar crystal and the purity of multi-crystalline silicon can be increased from 99. 50% to 99. 86%, in which various impurities are reduced slightly.