摘要
以ReF6、WF6及H2为原料,用化学气相沉积法,成功地在铜基体表面沉积出钨铼合金。试验分析表明:合金成分均匀,且可由反应气体配比控制,随ReF6增加,合金中铼含量增加;沉积层组织和形貌随沉积温度升高或反应气体中ReF6的增加,由致密的柱状晶发展为杂乱的树枝晶;沉积层结构随ReF6的增加由单一固溶体向固溶体+金属间化合物+铼单质发展。
W-Re alloys have been deposited successfully on copper substrate by chemical vapor deposition using the mixture of ReF6, WF6 and H2.The composition, microstructure and performance of the deposits have been analyzed. The results showed that the deposits are homogeneous, their composition can be controlled by the variation of WF6 or ReF6 percentage in the mixture. With the increase of ReF6 content, rhenium in the alloy increases as well. With the increase of temperature or content of ReF6, the microstructure changes from columnar to disordered dendrite crystal. With the increase of ReF6, the structure of deposited layer changes from W-Re solid solution to W-Re solid solution＋ inter-metallic compound W0.80Re0.20＋Re particle.
出处
《中国表面工程》
EI
CAS
CSCD
2006年第6期39-42,共4页
China Surface Engineering
基金
国家"863"项目(2003AA305990)
关键词
化学气相沉积
钨铼合金
工艺
chemical vapor deposition
W-Re alloys
technics
