半球形固体浸没透镜显微系统的透射光场研究

Transmission Field Study of Optical Microscopy Systems with a Hemisphere Immersion Lens

应用高数值孔径系统的矢量衍射理论研究了半球形固体浸没透镜(SIL)球面表面的反射对SIL系统透射场的影响.研究结果表明,半球形SIL球面表面的反射对SIL显微系统的透射光强产生很大的影响.然而,这种反射不改变半球形SIL显微系统的分辨率.SIL球面介质界面材料的折射率失配越大,透射光强减小越多.在SIL的球面表面涂上减反膜或者在物镜和SIL之间填充折射率较大(但比SIL的折射率小)的介质可以提高系统的透射光强.

The reflection effect of the spherical surface of a hemisphere solid immersion lens （SIL） has been investigated using the vectorial diffraction theory for high numerical aperture systems. The results showed that this reflection had an important influence on the transmitted field intensity of the SII. microscopy system. However,the reflection on the spherical surface of a hemisphere SIL did not change the resolution of the hemisphere SIL microscopy system. The larger mismatch in refractive indiced on both sides of the SIL＇ s spherical interface results in the less transmission intensity of the system. This disadvantage could be overcome by using one layer of antireflecting film that was coated on the SIL＇s spherical surface or by filling the space between the objective and the SIL with a material with large （but smaller than SIL＇s） refractive index.