微小气体流量检测技术的研究

Research on technology of micro-gas flow measurement

系统地介绍了用热式流量传感器测量微气体流量的方法,并在此基础上提出了微气体流量检测仪器的设计方案,同时阐述了微气体流量检测的基本概念、检测方法以及热式质量流量的测量原理。设计的检测仪器方案主要以AWM3100为核心组成,相关的电路设计包括A/D转换电路,信号选通电路,复位电路,按键电路以及以AT89C52为核心的采集控制电路,最后为该检测仪器设计了软件流程图。

In this paper,a new king of gas flow measuremnt system was introduced.This system was based on AT89C52,and the core of it was AWM3100 which was a kind of thermal mass flow sensor.In the beginning,the author gave basic concept of flow testing and then introduced flow testing principle.Mterwards,the hardware and software of this system were included.The relative circuits include A/D conversion,singal selecting,resetting,key-pressing circuits and the sampling/controlling circuit.In the part of software design,using MCS-51 ASM language to write the program,and the softwrare flow chart was given.In the end,summarization and prospect of this measurement system were provided.