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浸渍硝酸铝法提高镀膜坩埚性能 被引量：2

IMPROVING THE PROPERTIES OFPLATED CRUCIBLE BY MEANS OFALUMINUM NITRATE IMPREGNATION
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摘要 经过一系列的试验，研制出了浸渍硝酸铝法提高坩埚使用寿命的新工艺，从而达到了使炭－石墨坩埚能满足超薄膜镀铝工艺的要求。 Abstract:Through a series of experiments, the new technology have developed by impregating with aluminum nitrate can improve the service life of crucible, thereby make carbon- graphite crucible to satisfy for all requirements of ultrathin- film aluminum platedtechnology.
作者 王明华
机构地区 上海申贝炭棒厂
出处 《炭素》 1996年第4期37-40,共4页 Carbon
关键词 浸渍 硝酸铝 镀膜 性能 镀铝 石墨
分类号 TQ127.11 [化学工程—无机化工]
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同被引文献18

  • 1黄建华.真空蒸镀铝用碳──石墨蒸发舟应用技术综述[J].炭素,1994(2):39-43. 被引量：2
  • 2专利选登.蒸镀用碳质坩埚[J].新型碳材料,1996,11(4):59-62.
  • 3Xue X M, Wang J T, Quan M X. Wettability and Spreading Kinetics of Liquid Aluminum on Boron Nitride.J. Mater.Science, 1991:6391-6395.
  • 4Xue X M, Wang J T, Quan M X. Wetting Characteristics and Interfacial Reaction of Liquid Alumium on Hot-pressed Boron Nitride Substrate. Materials Science and Engineering, 1991,Al 32:277-280.
  • 5M.K.Bannister and M.V.Swain. A preliminary investigation of the corrosion of a TiB2/BN/AIN composite during aluminium evaporation. Ceramics international, 1989,15:375-382.
  • 6张国军.反应热压法制备TiB2—AIN—BN导电复相陶瓷（BAT瓷）[J].中国陶瓷,1996,24(2):8-12.
  • 7J.L.Jeong, B.M.Lim, J.H.Moon. Reaction mechanism between BN-sprayed graphite and molten Al in vacuum, and its application to the evaporation source for reactive metals including Al. Research Insititute of Industrial Science, 1993:873-875.
  • 8Christos G,Kontoyannis.Pyrolytic boron nitride coated graphite as a container of reference electrodes for molten fluorides,Electrochimica Acta, 1995.40:2547-2551.
  • 9Anatoliy Nechepurenko.Sergey Samuni.Oxidation protection of graphite by BN coating.Solid State Chemistry,154,162-164.
  • 10Byung-jin Choi.Chemical vapor deposition of hexagonal boron nitride films in the reduced pressure. Materials,1999,34:2215-2220.

引证文献2

二级引证文献7

炭素
1996年 第4期

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