超精密非球面镜面计算机辅助设计与应用

Study and Applications of Computer Aided Design for Ultra-precision Aspheric Lens

非球面镜面加工技术的研究已经成为先进制造技术的核心问题之一,相关的超精密装备制造关键技术除了机床本体,最重要的是系统控制软件及应用软件的开发,这是制约自主产权的超精密加工装备技术发展的瓶颈问题之一。结合作者在日本从事NEDO项目合作的实际经验,深入细致地阐述了超精密非球面镜面计算机辅助设计(CAD)系统的算法原理、系统结构及系统实现,并通过实际的光学镜面设计实例,介绍SGT-CAM软件系统具体开发及应用,为超精密非球面镜面的计算机辅助加工打下了基础。该系统已经成功地应用于自行开发的小型超精密镜面加工机SGT100上,形状误差小于100纳米,表面粗糙度小于5纳米,得到有关专家的充分肯定。

Manufacturing technology of ultra-precision aspheric lens becomes one of the key technologies of advanced manufacturing. As to ultra-precision equipment, the most important key is the development of control software and application software in addition to the machine tool body. In this paper, the authors discuss deeply the algorithms, the configuration and the realization of computer aided design system of ultra-precision for aspheric lens in combination with the experiece got from the cooperative Japanese project of NEDO. An example is proposed to clarify the application of the developed system SGTCAM cooperating with the small size ultra-precision lens machine tool-SGT-n. The result is obtained as high geometrical accuracy（PV）under 100 nano meter, and super surface roughness under 5 nano meter. Such a result has been confirmed by experts.