摘要
通过对各种测厚传感器性能指标的综合评价,以及对多种厚度测量方法的对比研究,提出了一种以激光传感器和CCD扫描技术相结合、以计算机控制技术为核心的厚度测量的新方法。实际测量现场中,步进电机突然制动所引入的外来振动干扰以及因环境温度变化所导致的工作台变形都是导致厚度测量误差的重要因素,联合对振动系统的建模分析与对测点位置实时标定,以在线补偿测量误差,由此共同构建一个复合板厚度在线监测系统。实际应用结果表时,该系统可有效抑制外来诸多干扰因素的影响,从而实现了复合板厚度的在线高精度测量。
By comprehensively evaluating several typical sensors and analyzing various methods for thickness measurement a new method combining laser sensors and CCD scanning technology with the computer control technology was proposed. Also, aiming at vibration interference by sudden broke from stepping motor and worktable distortion from temperature change in practical thickness measurement, we use vibration modeling and real time demarcate the distance of two laser-CCD to compensate measurement error online. Thus, a complex board online thickness measurement system was established. The site tests showed that the system is good for restrain various kinds of exterior interference. Accordingly, the system realizes high-accuracy thickness measurement on line.
出处
《机械设计与研究》
CSCD
北大核心
2006年第6期91-94,98,共5页
Machine Design And Research
关键词
测厚
激光-CCD
振动系统的建模
实时标定
thickness measurement
Laser-CCD
vibration modeling
real time demarcate
