一种遮挡式VOA器件的设计与制作

The design and fabrication of MEMS-based blocking-type variable optical attenuator

利用0.45节距的单根GR IN-Lens与微电机械(M icro E lectron ic M echan ical System,MEMS)挡光片相结合研制出一种连续可调光衰减器,由于采用单根的GR IN-Lens透镜作为耦合部件使得器件整体结构紧凑,在设计上由于MEMS遮挡片置于单模光纤与GR IN-Lens之间的空隙处使得所需遮挡的光斑尺寸大大减小从而降低了对MEMS遮挡片伸缩量的要求。经对所试制的样品进行测试,结果表明,衰减器光学性能良好,插损(insertion loss,IL)、回损(return loss,RL)、动态范围(dynam ic range)等指标达到了预计的结果。

A continuously adjustable variable optical attenuator （VOA） is developed by combining single 0.45 pitch GRIN-Lens and MEMS shutter. This design can achieve compact package size and can lower the demand for the action distance of the MEMS shutter through inserting the shutter into the gap between the single mode fiber and GRIN-Lens. The testing result of the samples shows that this VOA has good performance in insertion loss, return loss and dynamic range.