摘要
借助计算流体动力学(CFD)商业软件FLUENT,采用数值模拟的方法,对基于MEMS的壁剪应力传感器热交换效应进行了分析。计算结果表明:在壁剪应力传感器的热膜下方加入真空腔或者空气腔是十分必要的。针对水流中测量的计算结果显示,真空腔和空气腔在整个计算区域的温度场分布以及对流体的传热效率的差别不大,而空腔可以明显地减小底层的热损失,这对提高剪应力传感器的灵敏度是十分有利的。此外,MEMS壁剪应力传感器的尺寸效应对传热效率也存在影响。
The thermal effect of MEMS wall shear stress sensors is analyzed by using the computational fluid dynamics （CFD） commercial software FLUENT. The simulating results demonstrate that it is very necessary to add a vacuum cavity or an air cavity beneath the hot-film of MEMS wall shear stress sensors. The result of calculation in flowing water shows that the difference between the effects of the vacuum cavity and the air cavity is very small in the temperature distribution and the heat transfer rate to the flowing water, and the vacuum cavity Can signally reduce the heat lost irretrievably to the substrate, which is very necessary to improve the sensitivity of wall shear stress sensors. In additional ,the geometry of sensors also influence the heat transfer rate of wall shear stress sensors.
出处
《传感器与微系统》
CSCD
北大核心
2006年第12期32-34,38,共4页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(0372033)
