摘要
开发了一种高精度三维坐标测量机,它包括一套激光测头系统和高性能的伺服机构,具有精确控制、定位优化、三级减速近似、在线位置修正和光滑算法等功能.实验结果表明,在6400mm×2100mm×1500mm的整个测量范围内,测量精度优于30μm;在区域范围内,测量精度优于8μm,采样速率超过1000点/min.该测量系统的测量效率很高.另外,还可以用于测量软材料表面.
A precise and fast 3 D coordinate measuring machine, which is composed of a laser probe head and servomechanism with high performance, was developed utilizing precise control, positioning optimization, approximation of deceleration with three levels broken line, online position correction and smoothing algorithm. The experimental results indicated that the measuring accuracy is better than 30 μm in the whole measuring range of 6 400 mm×2 100 mm × 1 500 mm and 8 μm in a local measuring range, and the sampling rate can exceed 1 000 points/min. The measuring efficiency is very high. In addition, the machine can be applied to measure soft material surfaces, which is a challenge for most of the coordinate measuring machine.
出处
《纳米技术与精密工程》
EI
CAS
CSCD
2006年第4期301-306,共6页
Nanotechnology and Precision Engineering
关键词
坐标测量机
激光测头
3D轮廓测量
coordinate measuring machine (CMM)
laser probe head
3 D profile measurement