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六硼化镧阴极在电子束加工技术中的应用 被引量:2

A pp LICATION OF LaB 6 CATHOD IN THE ELECTRONIC BEAM PROCESS
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摘要 本文通过对LaB6阴极的初步研究和探讨,显示了LaB6阴极在电子束加工技术中的广阔应用前景.文章着重从以下几个方面描述了LaB6的优良性能:高的亮度、高可靠性。 The paper describes the advantageoes properties of the LaB 6 eathod, sach as: high brightrness, reliability, stability and long lifetime and its uses in the electronbeam procesing.
作者 李本功
出处 《山东科学》 CAS 1996年第4期44-46,共3页 Shandong Science
关键词 电子枪 六硼化镧 可靠性 电子束加工 阴极 electronic gun brightness stability reliability lifetime.
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  • 1曾朝伟,李文恩,钱天宇,黄兰友.六硼化镧电子枪[J].电子显微学报,1990,9(1):71-75. 被引量:5
  • 2Hirakimoto Akira, Ohnishi Shuhei, Maeda Hiroki, et al. Progress of microfocus X-ray systems for fluoroscopic and computed tomography. Spectrochimica Acta Part B Atomic Spectroscopy, 2004, 59(8): 1101
  • 3Wood K, Van V echten D, Fritz G, et al. Toward ultimate performance limits of thermoelectric (QVD) detectors. Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 2004, 520(1-3): 56
  • 4Djubua B C, Chubun NN. Emission properties of Spindt-type cold cathodes with different emission cone material. IEEE Transactions on Electron Devices, 1991, 38(10): 2314
  • 5Susan J,Mroczkowski. Electron emission characteristics of sputtered lanthanum hexaboride. J Vac Sci Techn, 1991, A9 (3):586
  • 6Akie Yutani,Akihiko Kobayashi,Akira Kinbara. Work function of thin LaB6 films. Appl Sur fSci, 1993, 70-71(1-4): 737
  • 7Ebihara K, Hiramatsu S. High-current-density gun with a LaB6 cathode. Review of Scientific Instruments, 1996, 67(8): 2765
  • 8Shimizu R, Shinike T, Lchimura S. Highly stable singlecrystal LaB6 cathode for conventional electron microprobe instruments. J Vac Sci Techn, 1987,5(3):15
  • 9朝伟 凌启芬 黄琦.电子光学分析仪六硼化镧电子源的研究[J].真空技术,1979,(3).
  • 10Schmidt P H, et al. Design and optimization of directly heated LaB6 cathode assembilies for electron beam instrument. J Vac Sci Techn, 1978,15(4):1554

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