摘要
本文根据大连理工大学三束材料改性国家重点实验室的电子回旋共振(ECR)微波等离子实验装置,结合等离子体源中的各种物理参量,采用一种简便快捷的方法在计算机上对ECR等离子体的磁场位形进行了数值模拟,数值模拟结果表明在共振区磁场强度的值达到最大值,这与实验结果一致.
The microwave ECR plasma source device of state key laboratory of materials modification by laser, ion and electron beams belongs to Dalian University of Technology. In this paper, this device was used to obtain the numerical simulation of magnetic field configuration based on varies physical parameters, Numerical simulation result showed that the magnetic field reached the maximum value at the resonance zone along the axial position. This result is conformed to the experimental measurement.
出处
《大连大学学报》
2006年第6期8-10,19,共4页
Journal of Dalian University