摘要
介绍一种新型三电极结构SO2气体传感器的工作原理、结构设计及其关键制作技术。给出了测试结果,并进行了分析和讨论。
The working principle, structure design and critical fabricating technology of a new type of SO2 gas sensor with three-electrode structure are introduced. The measure results are presented, analysed and discussed.
出处
《传感器技术》
CSCD
1996年第6期31-33,37,共4页
Journal of Transducer Technology
关键词
三电极
气体传感器
控制
电位电解
二氧化硫
Three-electrode SO, gas sensor Controlled potential electrolysis