用E×B质量分析器分析Au－Si液态金属离子源（LMIS）的束流成分

Mass Spectra of Au-Si Liquid Metal Ion Source By E×B Mass Filter

本文介绍了Ａｕ－ＳｉＬＭＩＳ的结构以及源的发射特性，利用Ｅ×Ｂ质量分析器，获得了Ａｕ－ＳｉＬＭＩＳ的质谱图。

In this paper, Structure of Au-Si LMIS and its emission properties are described. Mass spectrum of Au-Si LMIS is measured by E×B mass filter, errors are analysed.