ZnSe多晶化学机械抛光研究

Study on the Chemical Mechanical Polishing of ZnSe Polycrystal

本文针对ZnSe多晶的性能,在试验的基础上,研究出一套实用的、行之有效的ZnSe多晶加工工艺,并重点讨论了化学机械抛光工艺。同时对加工后零件的工艺参数、表面质量及透过率的测试,结果表明所采用的化学机械加工法可取得非常好的抛光效果。

The paper introduces a set of practical and effective processing technology of ZnSe polycrystal on the basis of a large number of experiments and puts emphasis on chemical mechanical polishing technology. We also test the processing parameter, surface quality and transmittance after we process the ZnSe material. The results show that chemomechanical polishing processing we have applied is efficient and practical.