微纳加工技术在超微电极制备中的应用

Application of Micro/nanofabrication Technologies in the Ultramicroelectrode Fabrication

从电极材料、绝缘材料、薄膜的图形化等方面,评述了微纳加工技术在单超微电极和超微电极阵列制备中的应用。在单超微电极的制备中,随着微纳加工技术的引入,可以实现具有规则几何形状和微小电极尖端的单超微电极的重复性制备。

The fabrication procedure of uhramicroelectrodes （UMEs） based on micro/nanofabrication technologies is described at aspects of electrode materials, insulation materials, and the patterning of thin film. Micro/nanofabrication technologies can offer the controllable approach for the UMEs fabrication down to micro/ nanometer scale. Micro/nanofabrication technologies have been introdueed to the single UMEs fabrication in an attempt to enable the reproducible construction of fine tips with exact geometries.