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p型ZnO薄膜研究进展 被引量:4

Recent progress on p-type ZnO films
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摘要 ZnO薄膜是一种应用广泛的半导体材料.近几年来,随着对ZnO的光电性质及其在光电器件方面应用的开发研究,ZnO薄膜成为研究热点之一.制备掺杂的p型ZnO是形成同质p-n结以及实现其实际应用的重要途径.近来已在p型ZnO及其同质结发光二极管(LED s)研究方面取得了较大的进展.目前报道的p型ZnO薄膜的电阻率已降至10-3Ω.cm量级.得到了具有较好非线性伏安特性的ZnO同质p-n结和紫外发光LED.本文就其最新进展进行了综述. As a wide-band semiconductor material, ZnO has been widely used for many applications. Recently, ZnO has attracted great attention to application of optoelectronic devices because of the notable properties. Growing p-type ZnO film is the key step for making ZnO homogeneous p - n junctions and its application. Both n - type and p - type ZnO will be required for development of homojunction light - emitting diodes (LEDs) and laser diodes (LDs). The electrical resistivity is dropped to 10-311 ~ cm level now. ZnO homogeneous p - n junctions with good nonlinear I - V characteristics and ultra-violet emission have been reported in the literature. Recent research progresses on p - type ZnO films and related homogeneous p - n junctions are summarized in this paper.
出处 《材料科学与工艺》 EI CAS CSCD 北大核心 2006年第6期637-641,645,共6页 Materials Science and Technology
基金 国家自然科学基金资助项目(60244003) 湖北省新世纪高层次人才工程资助项目
关键词 ZNO薄膜 P型掺杂 同质p—n结 ZnO film p - type doping homogeneous p - n junction
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