摘要
研制了一种基于动态聚焦探测法的新型光针式三维表面形貌测量仪,该仪器可实现表面三维形貌的快速、无损、非接触测量。介绍了该仪器的测量原理、仪器结构、伺服机构的设计并给出了实测结果。仪器垂直测量范围为500μm;垂直方向测量精度可达0·5μm,分辨率为0·01μm。
A novel optical stylus profilometer based on dynamic focus detection is developed. By using the profilometer the measurement for surface 3D topography can be realized rapidly, non-destructive and non-contact. The measuring principle, structure, design of the servo system is introduced and the experiment results are given. The maximum vertical measuring range of the instrument can reach 500μm with a minimum resolution of 0.01μm and the measuring precision of 0.5μm.
出处
《工具技术》
北大核心
2006年第11期58-60,共3页
Tool Engineering
关键词
表面形貌测量
聚焦探测法
非接触测量
surface topography measurement, focus detection, non-contact measttrement
