MOEMS陀螺的谐振腔设计

Resonator design for MOEMS gyroscope

微光机电(MOEMS)陀螺代表着微型光学陀螺的重要发展方向,而MOEMS谐振腔的设计是谐振式MOEMS陀螺的核心技术.提出了一种新颖的基于微纳米加工技术的MOEMS空间谐振腔结构,介绍了其工作原理和系统构成.建立了谐振腔的数学模型,并利用MATLAB软件对其重要参数进行了仿真计算及分析.为提高谐振腔清晰度及系统测量精度,优化了谐振腔输入输出镜的技术指标,并在此基础上完成了谐振腔的微加工工艺设计.结果表明:所设计的谐振腔清晰度可以达到346,陀螺极限灵敏度为0.25(°)/h,同时可以有效克服克尔效应、背向散射、偏振等光路噪声的影响.

Micro-opto-electro-mechanical systems（MOEMS） gyroscope is one of the most potential development directions of micro-optical gyroscope. MOEMS resonator design is the key technique of MOEMS resonator gyroscope. A novel MOEMS spatial resonator based on micro-nano machining technology was put forward. The principle and structure of the resonator were introduced. The mathematical model was established. Important parameters of the resonator were calculated and analyzed with MATLAB. The in-out mirror of the resonator was optimized to increase the finesse of the resonator and the sensitivity of the gyroscope. The micro-fabrication technics of resonator was designed. Results demonstrate that the finesse of the resonator can be 346, the sensitivity of the gyroscope reaches 0.25 （°）/h, and noise induced by Kerr effect, backscattering and so on can be overcome effectively.