模具钢表面连续激光沉积TiN类薄膜的研究

Study on Continuous Laser Deposition of TiN Thin Films on Die Steel Surface

利用波长为10.6mm的CO2连续激光诱导化学气相沉积的方法,在模具钢基体上沉积TiN类薄膜。采用XRD、OM、SEM、EDS等手段分析薄膜的组织和相结构。结果表明,当激光功率为600W,扫描速度为2mm/s,通过H2、N2和TiCl4之间的化学反应,在模具钢表面获得了均匀致密的枝晶组织,其显微硬度最高可达2500HV。

The TiN thin films were produced on die steel surface by the method of CO2 continuous laser chemical vapor deposition （LCVD）with wavelength 10.6 mm,the microstructure and morphology of which was analyzed by XRD, OM, SEM, and EDS. The results show that, when the laser power is 600 W and scanning velocity is 2 mm/s, through the reaction of H2, N2 and TiCl4,the TiN films deposited by LCVD on die steel surface with dense dendritic structure can be obtained. Its micro-hardness is 2500 HV.